Journal of South China University of Technology (Natural Science Edition) ›› 2010, Vol. 38 ›› Issue (9): 102-107.doi: 10.3969/j.issn.1000-565X.2010.09.019

• Materials Science & Technology • Previous Articles     Next Articles

Gas-Sensing Properties of Novel Composite Film Doped with Carbon Nanotubes

Lin Wei  Huang Shi-zhen  Chen Wen-zhe   

  1. College of Materials Science and Engineering,Fuzhou University,Fuzhou 350002,Fujian,China
  • Received:2009-11-11 Revised:2010-04-05 Online:2010-09-25 Published:2010-09-25
  • Contact: 林伟（1968-），男，博士生，副研究员，主要从事气敏材料的分析与制备、气敏传感器的研制与测试研究 E-mail:mqks@fzu．edu．cn
  • About author:林伟（1968-），男，博士生，副研究员，主要从事气敏材料的分析与制备、气敏传感器的研制与测试研究．
  • Supported by:

    国家“863”计划项目（2007AA03Z325）

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Abstract:

In this paper,first,SnO2/WO3/MWCNT composite thin film was prepared by magnetron sputtering a tin（Sn） target and a tungsten（W） target in a RF（Radio Frequency） reactive mode,and the corresponding gas sensor was fabricated.Next,the cross-section morphology,phase structure and chemical composition of the film were investigated by means of FSEM,XRD and XPS,respectively.Then,the gas-sensing properties of the gas sensor,such as the sensitivity,the selectivity and the response and recovery,were tested.The results of the experments show that the composite thin film gas sensor exhibits excellent gas-sensing,and that is sensitive to NO2 bat insensitve to other disturbance gases,and that elements W,Sn and C exist in SnO2/WO3/MWCNT composite thin film mainly in the form of W＋6,Sn＋4 and C,respectively.Finally,the mechanism of gas-sensing response of the film was primarily analyzed and discussed.

Key words: multi-wall carbon nanotube, composite thin film, sensor, gas-sensing property, nitrogen dioxide