Journal of South China University of Technology (Natural Science Edition) ›› 2021, Vol. 49 ›› Issue (11): 116-126.doi: 10.12141/j.issn.1000-565X.210104

Special Issue: 2021年电子、通信与自动控制

• Electronics, Communication & Automation Technology • Previous Articles     Next Articles

Research Progress of Tactile Sensors Based on Nano-ZnO

LIU Yurong1,2 CHEN Ming1   

  1. 1.School of Microelectronics,South China University of Technology,Guangzhou 510640,Guangdong,China;
    2.Guangdong Artificial Intelligence and Digital Economy Laboratory(Guangzhou),Guangzhou 510335,Guangdong,China
  • Received:2021-03-08 Revised:2021-05-05 Online:2021-11-25 Published:2021-11-01
  • Contact: 刘玉荣(1968-),男,博士,教授,主要从事薄膜晶体管、传感器及其集成技术研究。 E-mail:phlyr@scut.edu.cn
  • About author:刘玉荣(1968-),男,博士,教授,主要从事薄膜晶体管、传感器及其集成技术研究。
  • Supported by:
    Supported by the National Natural Science Foundation of China (61871195) and the Fundamental and Applied Fundamental Research Foundation of Guangdong Province (2021A1515011872)

Abstract: Tactile sensors have received extensive attention and research because they can imitate human skin to perceive external information.Among varies kinds of tactile sensor,Nano-ZnO-based tactile sensor has broad application prospects in the fields of bionic robots,human-computer interaction,biomedicine devices and wearable electronic systems due to its advantages of high sensitivity,high mechanical strength,strong flexibility,easy integration,good biocompatibility,and low-cost technology.This paper firstly introduced the piezoelectric mechanism and the manufacturing of Nano-ZnO-based tactile sensor.Next,it summarized the study progress of Nano-ZnO piezoelectric tactile sensor from the four aspects of piezoelectric performance improvement,multi-function,integration,and array fabrication,and listed the latest achievements in related technical fields and research directions.Then it summarized the application research of Nano-ZnO piezoelectric tactile sensor in pressure imaging,human action detection and physiological health monitoring in detail,and analyzed the shortcomings and the research trend of Nano-ZnO piezoelectric tactile sensor.

Key words: nano-ZnO, tactile sensor, piezoelectric effect

CLC Number: