Journal of South China University of Technology(Natural Science Edition) ›› 2011, Vol. 39 ›› Issue (11): 109-113,119.

• Materials Science & Technology • Previous Articles     Next Articles

Preparation of BaTiO3 Dielectric Film via Micro-Arc Oxidation and Surface Morphology of the Product

Wang Min  Guo Hui-yong  Huang Wen-bo  Li Wen-fang  Zhang Guo-ge   

  1. School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,Guangdong,China
  • Received:2011-05-16 Revised:2011-07-25 Online:2011-11-25 Published:2011-10-03
  • Contact: 李文芳(1964-) ，男，教授，主要从事材料表面工程研究． E-mail: mewfli@ scut． edu． cn E-mail:winawang@163.com
  • About author:王敏(1978-) ，女，博士生，广东技术师范学院讲师，主要从事材料表面工程研究．
  • Supported by:

    中国博士后科学基金资助项目( 200902317)

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Abstract:

Barium titanate film with good surface morphology and small surface roughness was prepared via microarc oxidation,and the corresponding preparation parameters were optimized by orthogonal test. Then,the film prepared under the optimal conditions was characterized,and the influences of solution concentration,current frequency,current density and reaction time on the surface morphology and roughness of the film were investigated. The results show that,under the optimal conditions,namely a Ba( OH)2 solution concentration of 0. 5mol /L,a current frequency of 100Hz,a current density of 2. 0 A/cm2 and a reaction duration of 5 min,the prepared film is mainly composed of tetragonal BaTiO3 and is of high dielectric constant ( 113. 0) at 1kHz,that the surface roughness of the film decreases with the increase of solution concentration and current frequency ( less than 150Hz) and with the decrease of current density and reaction time.

Key words: micro-arc oxidation, barium titanate film, dielectric property, surface morphology, surface roughness

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