Journal of South China University of Technology(Natural Science Edition) ›› 2012, Vol. 40 ›› Issue (10): 1-11.doi: 1000-565X(2012)10-0001-11

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Metal Oxide Thin Film Transistors and Their Application to Novel Display Technology

Cao Yong  Tao Hong  Zou Jian-hua  Xu Miao  Lan Lin-feng  Wang Lei  Peng Jun-biao   

  1. State Key Laboratory of Luminescent Materials and Devices∥Institute of Polymer Optoelectronic Materials and Devices,South China University of Technology,Guangzhou 510640,Guangdong,China
  • Received:2012-08-01 Online:2012-10-25 Published:2012-09-01
  • Contact: 王磊(1981-) ，男，博士，副研究员，主要从事光电薄膜器件和工艺研究． E-mail: mslwang@scut．edu．cn E-mail:yongcao@ scut.edu.cn
  • About author:曹镛(1941-) ，男，博士生导师，中国科学院院士，主要从事有机光电材料和器件研究．
  • Supported by:

    广东省教育部产学研结合项目( 2011A090200109) ; 华南理工大学中央高校基本科研业务费专项资金资助项目( 2012ZM0003) ; 中国博士后科学基金面上资助项目( 2011M500131) ; 广东省优秀博士学位论文作者资助项目( SYBZZXM201113)

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Abstract:

In order to meet the requirements of novel display technologies such as high-resolution large-screen LCD and AMOLED,a novel active-matrix panel is developed. This novel active-matrix panel is based on the metal oxide thin film transistor ( MOTFT) with metal oxide semiconductor materials as the active layer. In this paper,the material,the structure of the device,the fabrication process and the application of MOTFT are expounded,and the factors that influence the MOTFT performance are discussed. Moreover,the relevant research results achieved by the research team are presented as follows: ( 1) the MOTFT reaches a mobility of 21. 6 cm2 /Vs at its highest,with a threshold voltage of 1. 63 V,a current on /off ratio of 109,and a sub-threshold swing of 0. 216 V/decade; ( 2) based on the MOTFT panel,the first 5-inch color AMOLED screen in China is developed; and ( 3) the MOTFT panel has the advantages of high mobility,simple fabrication process,and lower cost as well as greater ease in achieving large screen display. Therefore,it has wide application prospects in developing novel display technologies such as TFT-LCD and AMOLED.

Key words: oxide semiconductor, thin film transistors, AMOLED, novel display