Differential Image Localization Method for IC PEM

doi:10.3969/j.issn.1000-565X.2014.09.013

Journal of South China University of Technology (Natural Science Edition) ›› 2014, Vol. 42 ›› Issue (9): 70-75.doi: 10.3969/j.issn.1000-565X.2014.09.013

• Electronics, Communication & Automation Technology • Previous Articles Next Articles

Differential Image Localization Method for IC PEM

Lin Xiao- ling¹ Lian Jian- wen² Zhang Xiao- wen¹ Yao Ruo- he²

1.Science and Technology on Reliability Physics and Application of Electrical Component Laboratory,China Electronic Product Reliability and Environmental Testing Research Institute,Guangzhou 510640,Guangdong,China; 2.School of Electronic and Information Engineering∥Institute of Microelectronics,South China University of Technology,Guangzhou 510640,Guangdong,China

Received:2013-12-30 Revised:2014-06-18 Online:2014-09-25 Published:2014-08-01
Contact: 姚若河(1961-)，男，教授，博士生导师，主要从事集成电路系统设计、半导体物理及器件研究． E-mail:phrhyao@scut.edu.cn
About author:林晓玲(1978-)，女，博士，高级工程师，主要从事微电子可靠性物理、IC 失效分析技术研究．E-mail:lin_x_l@163．com
Supported by:
国家自然科学基金资助项目(60776020);电子元器件可靠性物理及其应用技术重点实验室基金资助项目(9140A23090112DZ15284)

Abstract

Abstract:

When the bias voltage is low,PEM (Photon Emission Microscopy) failure signal is weak and is easy tobe influenced by noise,which results in a poor quality of PEM image.In order to solve this problem,a signal- noisemodel of PEM image is established,and a differential image localization algorithm is designed to improve the PEMprecision.First,this algorithm acquires two groups of images with different failure signal strengths by adjusting thebias voltage.Then,the average differential image of these two group images is calculated and dealt with by meansof mean filter and image binarization,thus obtaining a statistical image.Finally,IC failure points can be effectivelylocated according to the statistical image.Physical analysis demonstrates the accuracy of IC PEM based on the pro-posed differential image localization algorithm.

Key words: IC, differential image method, signal- noise model, PEM, defect localization

CLC Number:

TN322.8

Lin Xiao- ling Lian Jian- wen Zhang Xiao- wen Yao Ruo- he. Differential Image Localization Method for IC PEM[J]. Journal of South China University of Technology (Natural Science Edition), 2014, 42(9): 70-75.

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Differential Image Localization Method for IC PEM

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