Multi-field Coupling Vibration and Signal Analysis of Cross Microresonator

doi:10.12141/j.issn.1000-565X.220210

Abstract

Abstract:

Micro-Electro-Mechanical System (MEMS), also known as microsystem or micro-electro-mechanical system, is a high-tech micro device or system developed on the basis of microelectronic technology. MEMS integrates photolithography, corrosion, LIGA, silicon and non-silicon surface micromachining, precision machining and other technologies, and its size is on the micron scale. The microsensors produced by micromachining technology are widely used in engineering practice because of their simple structure, high sensitivity and stable operation. The microsensor usually uses electrostatic excitation and capacitance detection to detect the signal, that is, the displacement change of the resonator during vibration leads to the change of the distance between two electrodes, so as to change the capacitance between electrodes, thus the detected capacitance change frequency is the frequency of resonantor vibration. A cross microresonator was proposed to solve the problem of weak capacitance signal and low detection accuracy of microsensor. To study the multi-field coupling effect of microresonator, the multi-field coupling nonlinear dynamics equation of harmonic oscillator was established considering Van der Waals force and electric field force. The dynamic displacement of nonlinear vibration was obtained by using Linz Ted-Poincare method, and the influence of multiple physical field parameters on mean vibration displacement and capacitance variation of the harmonic oscillator was analyzed. The cross microresonator was fabricated by micro-nano machining, and the capacitance variation resulted from resonant frequency and vibration displacement was measured by electrostatic excitation-capacitance detection method. The results show that the cross microsensor increases the plate area, thereby aggrandizing the capacitance variation, and thus the signal intensity becomes stronger. When the plate area increases by 75%, the capacitance change is 4.2 times of the original, and the signal intensity increases by 5.0 times, so it is more convenient for capacitance detection.

Key words: MEMS, van der waals force, cross resonator, nonlinear vibration, multi-field coupling, capacitance detection

CLC Number:

TH113.1

HAN Guang, XU Lizhong . Multi-field Coupling Vibration and Signal Analysis of Cross Microresonator[J]. Journal of South China University of Technology(Natural Science Edition), 2023, 51(2): 10-19.

Figures/Tables 17

Fig. 1

Fig. 2

Table 1

Table 2

Fig. 3

Fig. 4

Table 3

Mean dynamic displacement and capacitance variation of resonators with different areas"

结构	S₂/10 ^-7 m ²	忽略范德华力 $Δ y ˉ$ /10 ^-7 m	考虑范德华力 $Δ y ˉ$ /10 ^-7 m	η₁/%	忽略范德华力 $Δ C$ /10 ^-11 F	考虑范德华力 $Δ C$ /10 ^-11 F	η₂/%
1	0	2.143 4	2.087 0	2.631 3	1.487 4	1.431 5	3.758 2
2	4.8	2.659 7	2.558 4	3.808 7	3.151 4	2.944 6	6.562 1
3	7.2	3.527 7	3.332 8	5.524 8	6.962 5	5.944 7	14.618 3

Table 3

Table 4

Fig. 5

Fig. 6

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Fig. 8

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Fig. 11

Fig. 12

Table 5

References 21

1	ZHU J X， LIU X M， SHI Q F， et al ． Development trends and perspectives of future sensors and MEMS/NEMS ［J］． Micromachines， 2019， 11（ 1）： 7.
2	WANG D B， GU X F， XIE J C， et al ． Research on a Ka-band MEMS power sensor investigated with an MEMS cantilever beam ［J］． Chinese Journal of Electronics， 2020， 29（ 2）： 378- 384.
3	DUAN S C， WANG W D， ZHANG S， et al ． A bionic MEMS electronic stethoscope with double-sided diaphragm packaging ［J］． IEEE Access， 2021， 9： 27122- 27129.
4	MÜLLER G， BEER S， PAUL S， et al ． Novel chemical sensor applications in commercial aircraft ［J］． Procedia Engineering， 2011， 25： 16- 22.
5	刘玉荣，陈明．基于纳米ZnO触觉传感器的研究进展［J］．华南理工大学学报（自然科学版）， 2021， 49（ 11）： 116- 126.
	LIU Yurong， CHEN Ming ． Research progress of tactile sensors based on nano-ZnO ［J］． Journal of South China University of Technology（Natural Science Edition）， 2021， 49（ 11）： 116- 126.
6	石树正，耿文平，毕开西，等．一体化仿生结构压电MEMS水声传感器［J］．微纳电子技术， 2022， 59（ 1）： 50- 57.
	SHI Shuzheng， GENG Wenping， BI Kaixi， et al ． Piezoelectric MEMS underwater acoustic sensor with integrated bionic structure ［J］． Micronanoelectronic Technology， 2022， 59（ 1）： 50- 57.
7	ULUDAG Y， TOTHILL I E ． Cancer biomarker detection in serum samples using surface plasmon resonance and quartz crystal microbalance sensors with nanoparticle signal amplification ［J］． Analytical Chemistry， 2012， 84（ 14）： 5898- 5904.
8	LI S， TANG Y Y， HU L Y， et al ． Autonomously driving multiplexed hierarchical hybridization chain reaction of a DNA cobweb sensor for monitoring intracellular microRNA ［J］． Sensors and Actuators B Chemical， 2021， 344： 130205.
9	SENESKY D G， JAMSHIDI B， CHENG K B， et al ． Harsh environment silicon carbide sensors for health and performance monitoring of aerospace systems：a review ［J］． IEEE Sensors Journal， 2009， 9（ 11）： 1472- 1478.
10	SCHMITT P， HOFFMANN M ． Engineering a compliant mechanical amplifier for MEMS sensor applications ［J］． Journal of Microelectromechanical Systems， 2020， 29（ 2）： 214- 227.
11	LANGE D， HAGLEITNER C， HIERLEMANN A， et al ． Complementary metal oxide semiconductor cantilever arrays on a single chip：mass-sen-sitive detection of volatile organic compounds ［J］． Analytical Chemistry， 2002， 74： 3084- 3095.
12	胡强，滕霖，岳亚洲，等．变壁厚半球谐振子设计及参数优化［J］．中国惯性技术学报， 2020， 28（ 6）： 789- 793.
	HU Qiang， TENG Lin， YUE Yazhou， et al ． Design and parameter optimization of hemispherical resonator with variable wall thickness ［J］． Journal of Chinese Inertial Technology， 2020， 28（ 6）： 789- 793.
13	朱莎，曾晗，王师奇，等．一种新型微加工交直流电场传感器设计［J］．仪表技术与传感器， 2021（ 6）： 41- 45.
	ZHU Sa， ZENG Han， WANG Shiqi， et al ． Design of novel micromachined AC/DC electric field sensor ［J］． Instrument Technique and Sensor， 2021（ 6）： 41- 45.
14	WAN L， LIU C C， KONG W X， et al ． Nonlinear vibration control of nano-beam based on capacitive acoustic sensors ［J］． International Journal of Applied Electromagnetics and Mechanics， 2020， 64（ 1-4）： 421- 429.
15	LI Y， LI H， XIAO Y F， et al ． A compensation method for nonlinear vibration of silicon-micro resonant sensor ［J］． Sensors， 2021， 21（ 7）： 2545.
16	李贞坤，程起有，冯志壮，等．微尺度悬臂梁非线性振动实验研究与理论分析［J］．实验力学， 2021， 36（ 6）： 793- 803.
	LI Zhenkun， CHENG Qiyou， FENG Zhizhuang， et al ． Experimental and theoretical study on the nonlinear vibration of cantilever microbeams ［J］． Journal of Experimental Mechanics， 2021， 36（ 6）： 793- 803.
17	KANG M， JO Y， MUN C， et al ． Nanoconfined 3D redox capacitor-based electrochemical sensor for ultrasensitive monitoring of metabolites in bacterial communication ［J］． Sensors and Actuators B：Chemical， 2021， 345： 130427.
18	ZHU H T， CHEN G H， XIONG Y F， et al ． A flexible wireless dielectric sensor for noninvasive fluid monitoring ［J］． Sensors， 2020， 20（ 1）： 174.
19	刘延柱，陈文梁，陈立群．振动力学．第二版．［M］．北京：高等教育出版社， 2011.
20	PAN Y， XU L Z ． Vibration analysis and experiments on electrochemical micro-machining using cathode vibration feed system ［J］． International Journal of Precision Engineering and Manufacturing， 2015， 16（ 1）： 143- 149.
21	HAN G， FU X R， XU L Z ． Free vibration for a micro resonant pressure sensor with cross-type resonator ［J］． Advances in Mechanical Engineering， 2021， 13（ 1）： 1- 11.

结构	忽略范德华力		考虑范德华力		η₃/%
结构	电压幅值/mV	差分放大10倍/V	电压幅值/mV	差分放大10倍/V	η₃/%
1	107.456	1.074 6	103.330	1.033 3	3.843 3
2	237.115	2.371 2	220.064	2.200 6	7.194 7
3	660.741	6.607 4	518.023	5.180 2	21.600 0

结构	电压幅值/V
结构	实验值	考虑范德华力	忽略范德华力
结构1	0.986	1.033	1.075
相对误差	—	4.77%	9.03%
结构2	2.122	2.201	2.371
相对误差	—	3.72%	11.73%
结构3	4.990	5.180	6.607
相对误差	—	3.81%	22.40%

[1]	QIN Xiao SHEN Ai-qin GUO Yin-chuan ZHOU Sheng-bo HE Tian-qin. Evolution Rule of Microcosmic Cracks in Pavement Concrete Under Multi-Field Coupling [J]. Journal of South China University of Technology (Natural Science Edition), 2017, 45(6): 81-88,102.
[2]	Yao Xiao-hu Han Qiang Li Lan-fang. Approximate Analytical Method of Torsional Buckling of Multi-Wall Carbon Nanotubes Embedded in Elastic Medium [J]. Journal of South China University of Technology (Natural Science Edition), 2008, 36(2): 48-54.
[3]	Han Qiang Li Lan-fang Luo Yi. Efect of van der W aals Force on Torsional Buckling of Double-Wall Carbon Nanotubes [J]. Journal of South China University of Technology (Natural Science Edition), 2005, 33(11): 104-106.