Effect of Ethylene Glycol on Lapping of Sapphire Wafer by Using Fixed Abrasive Pad
Wang Jian-bin Zhu Yong-wei Ju Zhi-lan Xu Jun Zuo Dun-wen
Journal of South China University of Technology (Natural Science Edition) . 2014, (11): 25 -30,39 .  DOI: 10.3969/j.issn.1000-565X.2014.11.005