Quality Improvement of SSP as the Substrate of Polycrystalline Silicon Thin Film Via ZM R Technique
Hu Yun-fei Shen Hui Wang Lei Zou Xi-wu Ban Qun Liang Zong-tun Liu Zheng-yi Wen Li-shi
Journal of South China University of Technology(Natural Science Edition) . 2005, (7): 28 -31 .