Journal of South China University of Technology(Natural Science) >

2023 , Vol. 51 >Issue 2: 10 - 19

DOI: https://doi.org/10.12141/j.issn.1000-565X.220210

Mechanical Engineering

Multi-field Coupling Vibration and Signal Analysis of Cross Microresonator

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  • 1.School of Mechanical Engineering，Yanshan University，Qinhuangdao 066004，Hebei，China
    2.Department of Mechanical and Electrical Engineering，Hebei Construction Material Vocational and Technical College，Qinhuangdao 066004，Hebei，China
韩光（1986-），男，博士生，主要从事微传感器系统多场耦合研究。

Received date: 2022-08-22

  Online published: 2022-08-25

Supported by

the National Key Research and Development Program of China(2018YFB1304803)

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Abstract

Micro-Electro-Mechanical System (MEMS), also known as microsystem or micro-electro-mechanical system, is a high-tech micro device or system developed on the basis of microelectronic technology. MEMS integrates photolithography, corrosion, LIGA, silicon and non-silicon surface micromachining, precision machining and other technologies, and its size is on the micron scale. The microsensors produced by micromachining technology are widely used in engineering practice because of their simple structure, high sensitivity and stable operation. The microsensor usually uses electrostatic excitation and capacitance detection to detect the signal, that is, the displacement change of the resonator during vibration leads to the change of the distance between two electrodes, so as to change the capacitance between electrodes, thus the detected capacitance change frequency is the frequency of resonantor vibration. A cross microresonator was proposed to solve the problem of weak capacitance signal and low detection accuracy of microsensor. To study the multi-field coupling effect of microresonator, the multi-field coupling nonlinear dynamics equation of harmonic oscillator was established considering Van der Waals force and electric field force. The dynamic displacement of nonlinear vibration was obtained by using Linz Ted-Poincare method, and the influence of multiple physical field parameters on mean vibration displacement and capacitance variation of the harmonic oscillator was analyzed. The cross microresonator was fabricated by micro-nano machining, and the capacitance variation resulted from resonant frequency and vibration displacement was measured by electrostatic excitation-capacitance detection method. The results show that the cross microsensor increases the plate area, thereby aggrandizing the capacitance variation, and thus the signal intensity becomes stronger. When the plate area increases by 75%, the capacitance change is 4.2 times of the original, and the signal intensity increases by 5.0 times, so it is more convenient for capacitance detection.

Key words： MEMS; van der waals force; cross resonator; nonlinear vibration; multi-field coupling; capacitance detection

Cite this article

HAN Guang, XU Lizhong . Multi-field Coupling Vibration and Signal Analysis of Cross Microresonator[J]. Journal of South China University of Technology(Natural Science), 2023 , 51(2) : 10 -19 . DOI: 10.12141/j.issn.1000-565X.220210

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