Electronics, Communication & Automation Technology

Research Progress of Tactile Sensors Based on Nano-ZnO

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  • 1.School of Microelectronics,South China University of Technology,Guangzhou 510640,Guangdong,China;
    2.Guangdong Artificial Intelligence and Digital Economy Laboratory(Guangzhou),Guangzhou 510335,Guangdong,China
刘玉荣(1968-),男,博士,教授,主要从事薄膜晶体管、传感器及其集成技术研究。

Received date: 2021-03-08

  Revised date: 2021-05-05

  Online published: 2021-05-10

Supported by

Supported by the National Natural Science Foundation of China (61871195) and the Fundamental and Applied Fundamental Research Foundation of Guangdong Province (2021A1515011872)

Abstract

Tactile sensors have received extensive attention and research because they can imitate human skin to perceive external information.Among varies kinds of tactile sensor,Nano-ZnO-based tactile sensor has broad application prospects in the fields of bionic robots,human-computer interaction,biomedicine devices and wearable electronic systems due to its advantages of high sensitivity,high mechanical strength,strong flexibility,easy integration,good biocompatibility,and low-cost technology.This paper firstly introduced the piezoelectric mechanism and the manufacturing of Nano-ZnO-based tactile sensor.Next,it summarized the study progress of Nano-ZnO piezoelectric tactile sensor from the four aspects of piezoelectric performance improvement,multi-function,integration,and array fabrication,and listed the latest achievements in related technical fields and research directions.Then it summarized the application research of Nano-ZnO piezoelectric tactile sensor in pressure imaging,human action detection and physiological health monitoring in detail,and analyzed the shortcomings and the research trend of Nano-ZnO piezoelectric tactile sensor.

Cite this article

LIU Yurong CHEN Ming . Research Progress of Tactile Sensors Based on Nano-ZnO[J]. Journal of South China University of Technology(Natural Science), 2021 , 49(11) : 116 -126 . DOI: 10.12141/j.issn.1000-565X.210104

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