Received date: 2018-06-20
Revised date: 2018-09-04
Online published: 2018-12-01
Supported by
Supported by the National Natural Science Foundation of China( 51875212) and the Science and Technology Planning Project of Guangdong Province( 2018A030313192,2017B090901023,2016B090927008)
Key words: plasma power supply; resonant converter; SiC MOSFET; power density; efficiency
WANG Zhenmin WU Jianwen FAN Wenyan YE Chunxian
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