华南理工大学学报(自然科学版) ›› 2020, Vol. 48 ›› Issue (10): 113-119,128.doi: 10.12141/j.issn.1000-565X.190642

• 电子、通信与自动控制 • 上一篇    下一篇

基于 MoS2 /Graphene 复合材料的摩擦纳米发电机

耿魁伟 徐志平 李徐   

  1. 华南理工大学 微电子学院,广东 广州 510640
  • 收稿日期:2019-09-23 修回日期:2020-05-07 出版日期:2020-10-25 发布日期:2020-09-14
  • 通信作者: 耿魁伟(1973-),男,博士,副研究员,主要从事第三代半导体材料及微纳传感器件等的研究。 E-mail:gengkw@scut. edu. cn
  • 作者简介:耿魁伟(1973-),男,博士,副研究员,主要从事第三代半导体材料及微纳传感器件等的研究。
  • 基金资助:
    国家自然科学基金资助项目 (61871195); 广东省科技计划项目 (2017A050506013); 广州市科技计划项目(201704030139)

Triboelectric Nanogenerator Based on MoS 2 /Graphene Composite

GENG Kuiwei XU Zhiping LI Xu   

  1. School of Microelectronics,South China University of Technology,Guangzhou 510640,Guangdong,China
  • Received:2019-09-23 Revised:2020-05-07 Online:2020-10-25 Published:2020-09-14
  • Contact: 耿魁伟(1973-),男,博士,副研究员,主要从事第三代半导体材料及微纳传感器件等的研究。 E-mail:gengkw@scut. edu. cn
  • About author:耿魁伟(1973-),男,博士,副研究员,主要从事第三代半导体材料及微纳传感器件等的研究。
  • Supported by:
    Supported by the National Natural Science Foundation of China (61871195) and the Science and Technology Planning Project of Guangdong Province (2017A050506013)

摘要: 制备了一种基于 MoS2 /Graphene 复合纳米材料嵌入式电子接收层的摩擦纳米发电机 (TENG),研究了不同电子接收层对 TENG 输出电压响应、频率响应及负载响应等参数的影响,并探讨了相关增强机制。在 5 Hz 的工作频率下,相比没有电子接收层的 TENG,嵌入电子接收层的 TENG 的输出电压提升了3 ~8 倍。在最佳外部负载阻抗的情况下,电子接收层为 MoS2 /Graphene 的 TENG (TENG-M/G) 的最大输出功率是电子接收层为聚酰亚胺膜的 TENG (TENG-PI) 的23 倍。通过分析转移电荷量的差异,探讨了不同电子接收层的 TENG 输出差异性的原因。为了进一步验证实验结果,制作了掺杂不同 PI 膜作栅绝缘层的金属-绝缘体-半导体 (MIS) 器件,通过分析其在 1kHz 下的C-V 特性曲线,探讨了造成 TENG 输出差异性的内部机制及 MoS2 /Graphene 复合材料在TENG 中的电荷捕获作用。

关键词: 摩擦纳米发电机, 二硫化钼, 石墨烯, 复合材料, 金属-绝缘体-半导体

Abstract: A triboelectric nanogenerator (TENG) based on MoS2 /Graphene composite nanomaterial embedded in electron-receiving layer was prepared. The effects of different electron-receiving layers on the output voltage re-sponse,the frequency response and the load response of TENG were studied,and the related enhancement mecha-nism was also discussed. Under the working frequency of 5Hz,the output voltage of TENG embedded in the elec-tron-accepting layer is increased by 3 to 8 times,as compared with that of the TENG without the embedded elec-tron-accepting layer. At the optimum external load impedance,the maximum output power of the TENG (TENG-M/G) with the electron-receiving layer of MoS2 /Graphene is 23 times that of the TENG (TENG-PI) with the elec-tron-receiving layer of polyimide film. By analyzing the total transfer quantity of electric charge,the causes of the difference in output among TENGs with different electron-accepting layers were discussed. In order to further prove the experimental results,metal-insulator-semiconductor (MIS) devices with different doped PI films as gate insula-ting layers were prepared. By analyzing its C-V characteristic curve at 1 kHz,the internal mechanism causing the difference of TENG output and the charge trapping effect of MoS2 /Graphene composite in TENG were discussed.

Key words: triboelectric nanogenerator, molybdenum disulfide, graphene, composite materials, metal-insulator-semiconductor

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