Thickness Uniformity Control of Sputtered Film Based on Roll-to-Roll System with a Rectangular Target
Huang Yun-xiang Wen Wan-yu Sun Jia-wei Huai Chuang-feng Zeng Hai-feng Zhong Fu-hui
Journal of South China University of Technology (Natural Science Edition) . 2015, (11): 81 -86 .  DOI: 10.3969/j.issn.1000-565X.2015.11.012