Electronics, Communication & Automation Technology

Effects of Active Layer Thickness of Dual-Gate Amorphous InGaZnO Thin Film Transistors on Their Electrical Characteristics

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  • School of Electronic and Information Engineering,South China University of Technology,Guangzhou 510640,Guangdong,China
蔡旻熹( 1992-) ,女,博士生,主要从事非晶InGaZnO 薄膜晶体管的建模和仿真研究. E-mail: eecaiminxi@ mail. scut. edu. cn

Received date: 2016-03-04

  Online published: 2020-12-04

Supported by

Supported by the National Natural Science Foundation of China( 61274085)

Abstract

Dual-gate amorphous InGaZnO thin film transistors ( DG a-IGZO TFTs) have better electrical characteristics than single-gate a-IGZO TFTs.In this paper,on the basis of a model describing the exponential distribution of defect states of a-IGZO/SiO2 interface,the effects of the active layer thickness of DG a-IGZO TFTs on their electrical characteristics are investigated by taking into consideration the interface defect states.The results show that,as the active layer becomes thinner,the two gates of DG a-IGZO TFTs get coupled more strongly,which causes the conduction channels initially locating at the front and back interfaces of active layer to extend into the bulk of a-IGZO,thus greatly increasing the field effect mobility of DG a-IGZO TFTs.In addition,with the decrease of the active layer thickness,the field effect mobility of DG a-IGZO TFTs gradually becomes immune to the interface defect states,while the subthreshold swing becomes more sensitive to the interface defect states.

Cite this article

CAI Min-xi YAO Ruo-he . Effects of Active Layer Thickness of Dual-Gate Amorphous InGaZnO Thin Film Transistors on Their Electrical Characteristics[J]. Journal of South China University of Technology(Natural Science), 2016 , 44(9) : 61 -66,72 . DOI: 10.3969/j.issn.1000-565X.2016.09.009

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