Journal of South China University of Technology(Natural Science) >
Fabrication of Zinc Oxide Thin Film Transistors via Low-Temperature Solution Processing
Received date: 2014-09-23
Revised date: 2014-12-08
Online published: 2015-02-10
Supported by
Supported by the National High-tech R&D Program (863 Program)(2014AA032702) and the National Natural Science Foundation of China(NSFC)(61204087,51173049,61306099)
In order to meet the requirements of novel display technologies such as flexible active-matrix organic light-emitting diodes (AMOLED),thin film transistors (TFTs) are fabricated,with low-temperature solution-pro-cessed ZnO as the semiconductor layer and with electrochemical oxidized alumina neodymium as the gate dielectric layer. In the preparation of ZnO semiconductor layer,carbon-free aqueous Zn(OH)x-(NH3)y(2-x)+ solution with low cost and fabrication simplicity is employed,and,more importantly,the energy for metal-ammine dissociation and ZnO formation is rather low thanks to the highly activated hydroxyl radicals. As a result,ZnO polycrystalline films can be realized at a relatively low temperature,namely 180℃. The proposed low-temperature solution-pro-cessed ZnO fabrication method combining with room-temperature electrochemically-oxidized gate dielectric layer helps achieve high mobility up to 0. 9 cm2 /(V·s),and is completely compatible with flexible substrates,so that it meets the demand of flexible electronic devices well.
Lan Lin-feng Song Wei Shi Wen Peng Jun-biao . Fabrication of Zinc Oxide Thin Film Transistors via Low-Temperature Solution Processing[J]. Journal of South China University of Technology(Natural Science), 2015 , 43(3) : 98 -102 . DOI: 10.3969/j.issn.1000-565X.2015.03.015
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