基于卷对卷矩形靶的溅射膜厚均匀性控制
黄云翔 温万昱 张佳伟 槐创锋 曾海峰 钟褔回
Thickness Uniformity Control of Sputtered Film Based on Roll-to-Roll
System with a Rectangular Target
Huang Yun-xiang Wen Wan-yu Sun Jia-wei Huai Chuang-feng Zeng Hai-feng Zhong Fu-hui
华南理工大学学报(自然科学版)
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2015, (11): 81
-86
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DOI: 10.3969/j.issn.1000-565X.2015.11.012