关键词: 精密测量, 激光扫描共焦显微技术, 刀具刃口半径, 最小二乘拟合, 不确定度

Abstract:

In order to represent cutting edge,a method for precision measurement and data processing is proposed,In the method,the laser scanning confocal microscope ( LSCM) is employed to measure the cutting edge in a preciseway,and then the cutting edge radius is fit through data post-processing.The results show that ( 1) the bankangle of angular gage block can affect the range of measurement and the judgment of asymmetry,which should bereasonably chosen according to the structural parameters of cutting tool; ( 2) as for TPMT16T304,the measurementeffect is better at the bank angle of 50.5°; ( 3) data smoothing can effectively remove the measurement noise,andthus improve processing efficiency and measurement accuracy; and ( 4) the least square fitting result is consistentwith the measurement value obtained by means of SEM and the nominal value,and the uncertainty of criterion issuperior to 0.084 μm.The results mentioned above indicate that the proposed method is easy to operate and moreprecise in measurement.Furthermore,it does not damage cutting tools.

Key words: precision measurement, laser scanning confocal microscopy, cutting edge radius, least square fitting, uncertainty