华南理工大学学报(自然科学版) ›› 2012, Vol. 40 ›› Issue (3): 64-68,125.

• 电子、通信与自动控制 • 上一篇    下一篇

基于晶界离散分布的多晶硅薄膜晶体管直流模型

严炳辉1 李斌1† 姚若河1 吴为敬2   

  1. 1.华南理工大学 电子与信息学院,广东 广州 510640; 2.华南理工大学 材料科学与工程学院,广东 广州 510640
  • 收稿日期:2011-08-14 修回日期:2011-11-02 出版日期:2012-03-25 发布日期:2012-02-01
  • 通信作者: 李斌(1967-) ,女,教授,博士生导师,主要从事深亚微米器件建模与集成电路可靠性、半导体器件与系统集成研究. E-mail:phlibin@scut.edu.cn E-mail:binghuiyan@126.com
  • 作者简介:严炳辉(1982-) ,男,博士生,主要从事半导体器件模型及电路仿真研究.
  • 基金资助:

    国家自然科学基金资助项目( 60776020) ; 国际合作项目( B14D8061610) ; 华南理工大学中央高校基本科研业务费专项资金资助项目( x2clD2104790)

Direct Current Model of Polysilicon Thin Film Transistor Based on Discrete Grain Boundary Distribution

Yan Bing-hui1  Li Bin1  Yao Ruo-he1  Wu Wei-jing2   

  1. 1.School of Electronic and Information Engineering,South China University of Technology,Guangzhou 510640,Guangdong,China; 2.School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,Guangdong,China
  • Received:2011-08-14 Revised:2011-11-02 Online:2012-03-25 Published:2012-02-01
  • Contact: 李斌(1967-) ,女,教授,博士生导师,主要从事深亚微米器件建模与集成电路可靠性、半导体器件与系统集成研究. E-mail:phlibin@scut.edu.cn E-mail:binghuiyan@126.com
  • About author:严炳辉(1982-) ,男,博士生,主要从事半导体器件模型及电路仿真研究.
  • Supported by:

    国家自然科学基金资助项目( 60776020) ; 国际合作项目( B14D8061610) ; 华南理工大学中央高校基本科研业务费专项资金资助项目( x2clD2104790)

摘要: 基于表面势的多晶硅薄膜晶体管( poly-Si TFT) 漏电流模型无法体现晶界的离散分布特性,而基于阈值电压模型的各工作分区电流表达式存在不连续性. 为克服此缺点,根据基于表面势模型的建模思想,考虑晶界势垒在沟道中离散分布的特点,提出了多晶硅薄膜晶体管的直流漏电流模型. 该模型采用单一的解析方程描述多晶硅TFT 各工作区的电流. 研究结果表明: TFT 工作于线性区且栅压一定时,随着漏压的增大,沟道有效迁移率降低; 随着栅压的增大或沟道的缩短,漏电压对沟道有效迁移率的影响减弱.

关键词: 多晶硅, 薄膜晶体管, 电流模型, 离散晶界, 表面势, 有效迁移率

Abstract:

The drain current model of the polysilicon thin film transistor ( poly-Si TFT) based on surface potential can not accurately describe the discrete grain boundary distribution,while the threshold-voltage-based model is not capable of continuously representing the drain currents in different operation regions. In order to solve these problems,a direct drain current model of the poly-Si TFT considering the discrete distribution of grain boundary potential in drains is established based on the surface potential. The proposed model describes the drain currents of the poly-Si TFT in different operating regions via an analytic equation.  Simulated results indicate that,when the poly-Si TFT works in the linear region at a certain gate bias,its effective mobility decreases with the increase in drain voltage,and that,with the increase in gate bias or with the decrease in channel length,the effect of drain voltage on the effective mobility weakens.

Key words: polysilion, thin film transistor, current model, discrete grain boundary, surface potential, effective mobility