华南理工大学学报(自然科学版) ›› 2007, Vol. 35 ›› Issue (10): 221-226.

• 创刊五十周年纪念专辑 • 上一篇    下一篇

多晶硅薄膜晶体管的电流和电容分析模型

郑学仁 邓婉玲 陈荣盛   

  1. 华南理工大学 微电子研究所,广东 广州 510640
  • 收稿日期:2007-03-01 出版日期:2007-10-25 发布日期:2007-10-25
  • 通信作者: 郑学仁(1946-) ,男,教授,博士生导师,主要从事器件建模、专用集成电路设计与仿真研究 E-mail:phxrzhen@scut. edu.cn
  • 作者简介:郑学仁(1946-) ,男,教授,博士生导师,主要从事器件建模、专用集成电路设计与仿真研究

Analytical Current and Capacitance Models of Polysilicon Thin-Film Transistors

Zheng Xue-ren  Deng Wan-ling  Chen Rong-sheng   

  1. Institute of Microelectronics , South China Univ. of Tech. , Guangzhou 510640 , Guangdong , China
  • Received:2007-03-01 Online:2007-10-25 Published:2007-10-25
  • Contact: Zheng Xue-ren (born in 1946) , male , professor,Ph. D. tutor , mainly researches on device modeling, A5IC design and simulation. E-mail:phxrzhen@scut. edu.cn
  • About author:Zheng Xue-ren (born in 1946) , male , professor,Ph. D. tutor , mainly researches on device modeling, A5IC design and simulation.

摘要: 提出一种用于电路模拟的基于表面势的多晶硅薄膜晶体管(poly-Si TFfs) 的电流和电容分析模型.采用非选代方法计算poly-Si TFfs 表面势随端电压的变化,从而大大地提高了上述模型的计算效率.基于表面势的解析计算和薄层电荷方法,提出了包括小尺寸效应和翘曲效应的电流电压模型.同时,文中还提出了基于电荷的电容模型.电流和电容模型在线性区和饱和区都是连续和准确的,不需要没有物理意义的光滑处理.与实验数据的比较发现,模型和实验数据符合得较好,这也证明了所提出模型的准确性.并且,该模型适用于电路仿真器.

关键词: 多晶硅薄膜晶体管, 表面势, 电流模型, 电容模型

Abstract:

This paper presents a surface-potential-based analytical current and capacitance model of polysilicon thin-film transistors (poly-Si TTs) for circuit simulation , in which the non-iterative numerical algorithm is adopted to calculate the surface potential of poly-Si TFfs as a function of terminal voltage , thus greatly enhancing the efficiency of the proposed model. Based on the analytical calculation of surface potential and the charge sheet approach , the current-voltage model considering both the small geometry effects and the kink effect is developed. Moreover , a charge-based gate capacitance model is derived. It is indicated that the current and capacitance model is continuous and accurate across the linear and saturation regions without any unphysical interpolation scheme. A comparison between the data obtained by the model and those by experiments shows that the results accord well with each other , which verifies the correctness of the proposed model. S0 , it can be concluded that the proposed model is suitable for the incorporation into circuit simulators.

Key words: polysilicon thin-film transistor, surface potential, current model, capacitance model