氧化铟锡薄膜在光学太阳反射镜上的应用

华南理工大学学报(自然科学版) ›› 2003, Vol. 31 ›› Issue (9): 40-43.

氧化铟锡薄膜在光学太阳反射镜上的应用

常天海

华南理工大学电子与信息学院广东广州510640

出版日期:2003-09-20 发布日期:2022-05-20
作者简介:常天海（1964－）男副教授主要从事薄膜及光电子技术的研究．

Application of Indium Tin Oxide Film to Optical Solar Reflector

Chang Tian-hai

College of Electronic ＆Information EngineeringSouth China Univ．of Tech．Guangzhou510640China

Online:2003-09-20 Published:2022-05-20

摘要/Abstract

摘要： 研究了光学太阳反射镜抗静电放电用氧化铟锡薄膜的设计原则．理论分析和实验结果表明在将氧化铟锡（ITO）薄膜应用于光学太阳反射镜（OSR）表面防静电放电时 ITO 薄膜的表面方阻 R□不能小于5kΩ·□－1否则会导致 OSR 的太阳光谱吸收率增加．建议取 R□＝5～106kΩ·□－1薄膜厚度 d＝（150～200）×10－10 m．同时必须保证ITO 薄膜接地效果良好否则会使 OSR 表面充放电现象更加严重．

关键词: 光学太阳反射镜, 抗静电放电, 氧化铟锡薄膜

Abstract: The design principles of indium tin oxide film（ITO） to prevent lectrostatic discharge for optical solar reflector（OSR） are studied．The theory analysis and experiment results show that two design principles are considered when ITO film is used to prevent lectrostatic discharge for OSR．One of them is that surface square resis-tance R□ of ITO film can’t be less than5kΩ·□－1otherwisethe sun spectrum absorptivity of OSR would increaseand surface square resistance R□ of5～106kΩ·□－1 and film thickness d of （150～200）×10－10 m are recommended．The another is that ITO film must be well groundedor else the surface charge and discharge phenomena of OSR would be much more serious．

Key words: optical solar reflector；prevent lectrostatic discharge；indium tin oxide film

中图分类号:

常天海. 氧化铟锡薄膜在光学太阳反射镜上的应用[J]. 华南理工大学学报(自然科学版), 2003, 31(9): 40-43.

Chang Tian-hai. Application of Indium Tin Oxide Film to Optical Solar Reflector[J]. Journal of South China University of Technology(Natural Science Edition), 2003, 31(9): 40-43.