从 n 型硅到 RTN 超薄 SiO2 膜的电流传输特性

冯文修张恒陈蒲生田浦延

Characteristics of Current Transportation from n-Si into Lamp Heating Rapid Thermal Nitridation Ultra-thin SiO2Films

Feng Wen-xiu Zhang Heng Chen Pu-sheng Tian Pu-yan

华南理工大学学报(自然科学版) . 2003, (10): 51 -54 .