硅压力传感器基座受力变形时的输出性能

胡国清龚小山周永宏邹崇 Jahangir Alam

Output Performance of Silicon Pressure Sensor Influenced by Deformation of Sensor Substrate

Hu Guo-qing Gong Xiao-shan Zhou Yong-hong Zou Chong Jahangir Alam

华南理工大学学报（自然科学版） . 2015, (3): 1 -8 . DOI: 10.3969/j.issn.1000-565X.2015.03.001