膜片式真空泵的抽气性能计算与测试分析

上官文斌张鹏郭一鸣刘宏慈蒋开洪

Calculation and Experimental Analysis of Pumping Performance of a Diaphragm Vacuum Pump#br#

Shangguan Wen-bin Zhang Peng Guo Yi-ming Liu Hong-ci Jiang Kai-hong

华南理工大学学报（自然科学版） . 2015, (8): 55 -61 . DOI: 10.3969/j.issn.1000-565X.2015.08.009