收稿日期: 2009-01-20
修回日期: 2009-03-07
网络出版日期: 2010-01-25
基金资助
国家自然科学基金资助项目(60776020)
Modified Model of Threshold Voltage for Thin-Film Transistors with Low-Doped Polysilicon
Received date: 2009-01-20
Revised date: 2009-03-07
Online published: 2010-01-25
Supported by
国家自然科学基金资助项目(60776020)
姚若河 欧秀平 . 低掺杂多晶硅TFT阈值电压的确定和提取[J]. 华南理工大学学报(自然科学版), 2010 , 38(1) : 14 -17,43 . DOI: 10.3969/j.issn.1000-565X.2010.01.003
In this paper, first, the surface potential of thin-film transistors with light-doped polysilicon is analyzed. Next, the gate voltage, which corresponds to the channel current that quickly increases when the surface potential deviates from the sub-threshold region, is considered as the threshold voltage. Then, by taking into consideration the single-exponential distribution of trap state density, the surface potential of the transistor is derived, and an ana- lytical model of the threshold voltage is presented. Finally, a numerical simulation is performed to verify the model. The results indicate that the threshold voltage obtained by the proposed model perfectly matches that extracted by the second-derivative method.
Key words: polysilicon; thin-film transistor; threshold voltage; surface potential
/
| 〈 |
|
〉 |