电子、通信与自动控制

低掺杂多晶硅TFT阈值电压的确定和提取

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  • 华南理工大学 电子与信息学院, 广东 广州 510640
姚若河(1961-),男,教授,博士生导师,主要从事集成半导体物理及器件研究.

收稿日期: 2009-01-20

  修回日期: 2009-03-07

  网络出版日期: 2010-01-25

基金资助

国家自然科学基金资助项目(60776020)

Modified Model of Threshold Voltage for Thin-Film Transistors with Low-Doped Polysilicon

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  • School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, Guangdong
姚若河(1961-),男,教授,博士生导师,主要从事集成半导体物理及器件研究.

Received date: 2009-01-20

  Revised date: 2009-03-07

  Online published: 2010-01-25

Supported by

国家自然科学基金资助项目(60776020)

摘要

对低掺杂多晶硅薄膜晶体管的表面势进行分析,将表面势开始偏离亚阈值区、沟道电流迅速增加时所对应的栅压作为晶体管的阂值电压.考虑到多晶硅薄膜的陷阱态密度为单指数分布,通过对低掺杂多晶硅薄膜晶体管的表面势进行求解,推导出一个多晶硅薄膜晶体管阈值电压解析模型,并采用数值仿真方法对模型进行了验证.结果表明:新模型所得到的阈值电压与采用二次导数法提取的阈值电压相吻合.

本文引用格式

姚若河 欧秀平 . 低掺杂多晶硅TFT阈值电压的确定和提取[J]. 华南理工大学学报(自然科学版), 2010 , 38(1) : 14 -17,43 . DOI: 10.3969/j.issn.1000-565X.2010.01.003

Abstract

In this paper, first, the surface potential of thin-film transistors with light-doped polysilicon is analyzed. Next, the gate voltage, which corresponds to the channel current that quickly increases when the surface potential deviates from the sub-threshold region, is considered as the threshold voltage. Then, by taking into consideration the single-exponential distribution of trap state density, the surface potential of the transistor is derived, and an ana- lytical model of the threshold voltage is presented. Finally, a numerical simulation is performed to verify the model. The results indicate that the threshold voltage obtained by the proposed model perfectly matches that extracted by the second-derivative method.

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