采用射频反应磁控溅射锡（Sn）靶和钨（W）靶的方法制备了SnO₂/WO₃/MWCNT复合薄膜材料和相应的气敏传感器,通过FSEM、XRD和XPS等方法分析了复合薄膜材料的横断面表面形貌、物相结构及表面化学组成,测试了该气敏传感器的灵敏度、选择性和响应恢复等气体敏感性能.实验结果表明：该复合薄膜气敏传感器具有较好的气敏性能,对NO₂有较好的灵敏度,对其他干扰气体不敏感;SnO₂/WO₃/MWCNT薄膜中,W、Sn、C主要以W^＋6、Sn^＋4和C的形式存在.文中还对气敏响应机理进行了初步的分析与讨论.

In this paper,first,SnO₂/WO₃/MWCNT composite thin film was prepared by magnetron sputtering a tin（Sn） target and a tungsten（W） target in a RF（Radio Frequency） reactive mode,and the corresponding gas sensor was fabricated.Next,the cross-section morphology,phase structure and chemical composition of the film were investigated by means of FSEM,XRD and XPS,respectively.Then,the gas-sensing properties of the gas sensor,such as the sensitivity,the selectivity and the response and recovery,were tested.The results of the experments show that the composite thin film gas sensor exhibits excellent gas-sensing,and that is sensitive to NO₂ bat insensitve to other disturbance gases,and that elements W,Sn and C exist in SnO₂/WO₃/MWCNT composite thin film mainly in the form of W^＋6,Sn^＋4 and C,respectively.Finally,the mechanism of gas-sensing response of the film was primarily analyzed and discussed.