收稿日期: 2024-03-27
网络出版日期: 2025-08-11
基金资助
国家重点研发计划项目(2022YFB4602800);西安市科技计划重点产业链核心技术攻关项目(23LLRH0079)
A Collaborative Control Method for Inkjet Printing Accuracy of Electronic Additive Manufacturing
Received date: 2024-03-27
Online published: 2025-08-11
Supported by
the National Key Research and Development Program of China(2022YFB4602800)
电子增材制造技术在高精度微电子制造中具有重要的应用价值,但打印速度波动导致的墨滴落点低精度问题一直制约着打印质量的提升。鉴于此,该文提出了基于LinuxCNC的S型速度规划+恒间距喷射(SSP-FDI)协同控制策略,通过将传统数控系统速度算法优化为S型速度控制算法来有效降低运动冲击,采用恒间距触发模式来实现墨滴间距的精确控制,削弱速度波动对落点精度的影响。作者还自主搭建了一套集成五轴运动控制与电子喷墨打印的实验平台,开发了相应的控制系统,设计了多角度折线以及电极对比实验。结果表明:相较于传统的梯形速度规划+固定频率喷射控制策略,SSP-FDI协同控制策略可显著降低墨滴落点的精度误差;在基板温度为100 ℃、20 mm × 20 mm的矩形电极打印实验中,补偿后的电极表面最大粗糙度降低至6 μm;在5组不同的基板温度下,样件表面粗糙度平均降幅达18.79%,电阻率平均降幅达18.70%。该文提出的基于LinuxCNC的协同控制策略能有效提升复杂轨迹下的打印质量,为高精度电子器件增材制造提供了一种新的解决方案。
关键词: 电子增材制造; 打印精度; LinuxCNC系统; 速度控制算法; 协同控制
刘清涛 , 于攀宇 , 郭炯棋 , 尹恩怀 , 杨鹏涛 , 吕景祥 . 一种电子增材制造喷墨打印精度的协同控制方法[J]. 华南理工大学学报(自然科学版), 2026 , 54(1) : 94 -103 . DOI: 10.12141/j.issn.1000-565X.250084
Electronic additive manufacturing technology possesses significant application value in high-precision microelectronics manufacturing. However, the improvement of printing quality is always restricted by the droplet placement inaccuracies caused by speed fluctuations. To address this issue, a collaborative control strategy based on LinuxCNC, termed S-shaped speed planning + fixed-distance injection (SSP-FDI), was proposed. By optimizing the traditional trapezoidal speed algorithm in numerical control systems into an S-shaped speed algorithm, mechanical shock can be effectively reduced. Simultaneously, by adopting a fixed-distance triggering mode, the droplet spacing can be accurately controlled, thus mitigating the impact of speed fluctuations on placement accuracy. Moreover, an experimental platform integrating five-axis motion control and electronic inkjet printing technology was independently developed, and the corresponding control system was developed. Finally, comparative experiments involving multi-angle polylines and electrode printing were designed. The results demonstrate that, as compared with the traditional trapezoidal speed planning + fixed frequency injection (TSP-FFI) strategy, SSP-FDI strategy significantly reduces droplet placement errors. In a 20 mm × 20 mm rectangular electrode printing experiment with a substrate temperature of 100 ℃, the maximum surface roughness of compensated electrodes decreases to 6 μm. Across five substrate temperature groups, the surface roughness of printed samples shows an average reduction of 18.79% and an average resistivity reduction of 18.70%. These findings indicate that the proposed LinuxCNC-based colla-borative control strategy effectively improves the printing quality for complex trajectories, offering a novel technical solution to high-precision additive manufacturing of electronic devices.
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