针对电液伺服振动台由于流量非线性导致的加速度振动信号波形失真现象，提出一种基于流量非线性逆模型的补偿控制策略。通过节流方程，建立滑阀两腔的非线性流量方程，结合液压系统连续性方程和受力平衡方程，获得电液伺服振动台的非线性模型，同时根据稳态点附近的泰勒方程，给出液压非线性系统的线性化控制模型；在考虑系统最大动出力的基础上，引入与负载压力相关的流量非线性补偿函数，使得补偿后的伺服阀流量与阀芯位移成线性关系。仿真与实验结果表明：该流量非线性补偿控制方法能有效降低加速度振动信号的波形失真现象，提高振动信号的跟踪精度。

In order to reduce the distortion of acceleration vibration signal caused by the flow nonlinearity on electro-hydraulic servo shaking table, a control strategy based on the nonlinear compensation of flow is presented. Nonlinear flow equations of two valve cavities are built through the throttle equation. Combined with the hydraulic continuity equation and force balance equation, a nonlinear model of electro-hydraulic servo shaking table is established. According to the Taylor equation near the steady state point, the linear control model of the nonlinear hydraulic system is also given. Considering the maximum dynamic output force, a nonlinear compensation function related to the load pressure is introduced, which makes the flow of the compensated servo valve linearly with the spool displacement. The simulation and experimental results show that the nonlinear flow compensation control method can effectively reduce the acceleration distortion and improve the tracking accuracy of the vibration signal.