机械工程

自支撑金刚石厚膜片的HFCVD 法制备及摩擦学特性

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  • 1. 南京航空航天大学 机电学院,江苏 南京 210016; 2. 盐城工学院 机械工程学院,江苏 盐城 224051
冯伟( 1983-) ,女,博士生,讲师,主要从事表面工程、精密与超精密加工研究.

收稿日期: 2016-03-18

  修回日期: 2016-05-16

  网络出版日期: 2016-10-04

基金资助

国家自然科学基金资助项目( 51275230) ; 江苏省科技计划项目( 2015057-22) ; 江苏省六大人才高峰项目( ZBZZ-002) ; 江苏省研究生培养创新工程项目( KYLX_0227) ; 南京航空航天大学中央高校基本科研业务费专项资金资助项目

Preparation and Tribological Properties of HFCVD-Based Freestanding Thick Diamond Film

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  • 1.College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,Jiangsu,China; 2.College of Mechanical Engineering,Yancheng Institute of Technology,Yancheng 224051,Jiangsu,China
冯伟( 1983-) ,女,博士生,讲师,主要从事表面工程、精密与超精密加工研究.

Received date: 2016-03-18

  Revised date: 2016-05-16

  Online published: 2016-10-04

Supported by

Supported by the National Natural Science Foundation of China( 51275230) and the Science and Technology Planning Project of Jiangsu Province,China( 2015057-22)

摘要

探讨了自支撑金刚石厚膜片的晶体生长模型,并依据模型通过热丝化学气相沉积( HFCVD) 法制备了厚度为0. 6mm 的自支撑金刚石厚膜片. 采用球- 盘式摩擦磨损试验机进行摩擦学实验,借助扫描电镜、拉曼光谱仪等研究了自支撑金刚石厚膜片分别与钢球、陶瓷球以及铝球组成对偶副时的摩擦学特性. 结果表明: 铝球做对偶球时平均摩擦系数最大,在对磨初始阶段很快出现了金属转移层; 陶瓷球做对偶球时摩擦系数最小,球表面物质的微观形貌呈微细碎屑状分布; 对磨后自支撑金刚石厚膜片的磨损量非常小,是良好的耐磨材料.

本文引用格式

冯伟 杨斌 卢文壮 . 自支撑金刚石厚膜片的HFCVD 法制备及摩擦学特性[J]. 华南理工大学学报(自然科学版), 2016 , 44(11) : 97 -102 . DOI: 10.3969/j.issn.1000-565X.2016.11.015

Abstract

A crystal growth model of freestanding thick diamond film was discussed,and on the basis of this model,a self-standing thick diamond film slice of a thickness of about 0.6mm was prepared by means of HFCVD ( Hot-Filament- Assisted Chemical Vapor Deposition) method.Then,a friction experiment of the film slice was conducted on a ball-disc tribometer,and the tribological properties of the film slices respectively with a steel ball,a ceramic ball and an aluminum ball as the friction pair were characterized by using a SEM and a Raman spectrometer.The results show that ( 1) when the friction pair is an aluminum ball,average friction coefficient is the biggest and metal transfer layer appears very fast in the initial stage of grinding; ( 2) when the friction pair is a ceramic ball,the average friction coefficient is the smallest and the ball surface material is in a fine clastic distribution; and ( 3) the wear of the film slice is very small after the experiment,which means that the film slice is a good wear-resistant material.

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