电子、通信与自动控制

焊料Sn3.5Ag4Ti( Ce,Ga) 与SiO2 基板低温活性焊接机理

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  • 华南理工大学 电子与信息学院,广东 广州 510640
成兰仙( 1981-) ,女,博士生,高级工程师,主要从事先进微电子封装材料研究.

收稿日期: 2015-11-20

  修回日期: 2016-03-09

  网络出版日期: 2016-08-21

基金资助

广东省科技计划项目( 2013B010403003)

Active Bonding Mechanism Between Sn3.5Ag4Ti( Ce,Ga) and SiO2 Substrate at Low Temperature

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  • School of Electronic and Information Engineering,South China University of Technology,Guangzhou 510640,Guangdong,China
成兰仙( 1981-) ,女,博士生,高级工程师,主要从事先进微电子封装材料研究.

Received date: 2015-11-20

  Revised date: 2016-03-09

  Online published: 2016-08-21

Supported by

Supported by the Science and Technology Planning Project of Guangdong Province( 2013B010403003)

摘要

采用扫描电镜、能谱仪和透射电镜研究了Sn3. 5Ag4Ti( Ce,Ga) 低温活性焊接SiO2基板界面的微观形貌和焊接机理,并根据反应热力学和活性元素的吸附理论分析了
Sn3. 5Ag4Ti( Ce,Ga) 与SiO2基板的焊接机理及焊接动力学过程. 实验结果表明,焊接界面由TiSi 和TiO2形成. 理论分析与实验结果一致表明: Ti 元素在SiO2基板表面的化学吸附可能是实现焊接润湿的主要原因,在焊接的初始阶段发挥重要的作用; Ti 与SiO2之间的界面反应并形成界面产物是实现Sn3. 5Ag4Ti( Ce,Ga) 与SiO2
基板焊接的主要机理.

本文引用格式

成兰仙 李国元 . 焊料Sn3.5Ag4Ti( Ce,Ga) 与SiO2 基板低温活性焊接机理[J]. 华南理工大学学报(自然科学版), 2016 , 44(9) : 67 -72 . DOI: 10.3969/j.issn.1000-565X.2016.09.010

Abstract

The interfacial microstructure and soldering mechanism of the low-temperature active bonding SiO2 substrate with Sn3.5Ag4Ti( Ce,Ga) alloy filler were investigated by means of SEM,EDX and TEM,and the mechanism and dynamic process of the active bonding between Sn3.5Ag4Ti( Ce,Ga) and SiO2 substrate were analyzed on the basis of the active adsorption and reaction thermodynamics theories.Experiment results show that TiSi and TiO2 phases form along the interface.Both theoretical results and experimental results indicate that the chemical adsorption of Ti on SiO2 substrate interface may be the main reason for wetting and plays an important role in the initial bonding stage,and that the main bonding mechanism of Sn3.5Ag4Ti( Ce,Ga) and SiO2 substrate can be described as the interfacial reaction between Ti and SiO2 and the forming of correspondent reactants.
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