建立了膜片式真空泵抽气性能的数学模型，针对模型中的工作容积参数，采用有限元分析方法计算其变化规律． 利用建立的模型，结合有限元仿真，对一款膜片式真空泵的抽气性能进行计算，然后将工作容积、抽气性能的预测结果与实测结果进行对比分析．结果表明，文中对工作容积和抽气性能的计算方法是有效的，计算结果精度满足工程要求． 利用文中计算方法，可以在膜片式真空泵的设计开发阶段较精确地预测产品抽气性能，并进行优化设计，这有利于提升产品抽气性能，缩短开发周期．

A mathematic model for the pumping performance of a diaphragm vacuum pump (DVP) is constructed
in the paper，and the finite element analysis method is used to calculate the change of the working volume，which is a parameter in the mathematic model． Then，by using the proposed model and by means of the finite element simulation，the pumping performance of a DVP is calculated． Finally，the prediction results of the working volume and the pumping performance are compared with the experimental ones． The comparison demonstrates that the proposed methods of calculating the working volume and the pumping performance are effective，and the result precision can meet the engineering requirements． In addition，the proposed methods can precisely predict the pumping performance of products and optimize the design during the process of design and development，which helps to improve the pumping performance and shorten the development cycle．